Exceptional performance in a small package!


Product Description

Best-in-class for heating wet-process chemistries. Designed to support advancements in ultra-pure cleanliness requirements. This compact heater utilizes fluoropolymer wetted materials, an o-ringless sealing design, and the capability to detect any breach in the fluid path. Suitable for all non-flammable chemistries in either single pass of recirculating flow applications.

Applications

  • Semiconductor wet processes
  • Filtration
  • Sterilization/cleaning

Features & Values

  • Advanced Cleanliness
    • Chemistry contained within PFA tubing to eliminate environmental exposure
    • No wetted o-ring seals eliminates source for contamination
    • Internal ground plane in the fluid path
  • Patented Purged Housing
    • Early notification of a breach in the fluid path prevents process contamination
    • Extends the life of the heater by continually removing chemical permeation
  • Compact & Modular
    • Reduces tool design space requirements
    • Facilitates retrofitting of existing tools
    • Simplifies manufacturing complexity
  • Low Internal Volume
    • Reduced cost of chemistry
    • Allows for faster heat-up time in recirculating applications
  • Additional Process Benefits
    • Low watt density for lower surface temperatures
    • Precise and stable temperature control

Specifications

  • Wattages: 2000 watts to 6000 watts
  • Voltages: 120 volts to 480 volts, single phase or 3 phase
  • Temperature Range: Up to 95°C
  • Pressure Range:
    • 689 kPa at 95°C for 1/2 inch inlet/outlet
    • 524 kPa at 95°C for 3/4 inch inlet/outlet
    • 276 kPa at 95°C for 1 inch inlet/outlet
  • Fluid Connections (Inlet/Outlet Sizes/Types):
    • 1/2 inch, 3/4 inch, or 1 inch flared
    • 1/2 inch, 3/4 inch or 1 inch Super 300 Type Pillar®
    • Drain: 3/8 inch, or 1/2 inch flared or Super 300 Type Pillar®
  • Wetted Surfaces:
    • PFA and PTFE fluoropolymer
    • No wetted "O" rings
  • Dimensions: 225mm x 508mm x 147mm
  • Watt Density: ≤ 9.5/in²
  • Flow Rate: 2 - 20 LPM
  • Safety Features:
    • Element temperture sensor - Choice between Type E, J, K thermocouple, 100-Ohm RTD, or 1000-Ohm RTD
    • Internal ground plan
    • Leak detection

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