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Process Technology, a leading manufacturer of inline, ultra-high purity heaters for the semiconductor industry, is excited to announce its new family of SHX and SHX-EX heaters for IPA and flammable solvents. This new line of low internal volume heaters is integral to ultra-high purity (UHP) solvent heating applications used for semiconductor manufacturing, including wafer cleaning, etching, and photoresist stripping processes. 

“Safely heating IPA and low flash-point solvents is paramount in our unique design.” States Doreen Langa, Sr. Product Manager. “Our patented purge system, indirect heating, and low watt density provide multi-level assurances for safe operation. Explosion-proof certification is also available.”

SHX’s advanced cleanliness design features a compact, indirect, ultra-pure, inline flow path – free of contact with O-rings. Patented purge technology eliminates risks associated with high-temperature fluid permeation and offers the assurance of immediate leak discovery.

Additional product specifications:

• Temperature: up to 90°C (194°F).
• Pressure: up to 475 kPa (69 PSI).
• Wattages: SHX 3kW, 6kW, 9kW, and 12 kW.
• SHX-EX 3kw and 6kw.
• Voltages: 200-480V in single or three-phase.
• Certifications: SHX – UL 499 & CE (pending),
• SHX-EX – UL 499 & CE (pending),
• ATEX II 2 G Ex db IIA TA Gb (pending),
• SEMI S2/S3 (pending).

Engineered to meet the highest performance, cleanliness, and safety standards; The SHX heater family is an optimal heating solution. Class 100 cleanroom assembled.

For sales information contact our customer service department.

For media information contact our Marketing Department.