Exceptional performance in a small package!


Product Description

Best-in-class heating for wet-process chemistries. Designed to support advanced Ultra-High-Purity (UHP) requirements. ChemHeat utilizes all fluoropolymer wetted materials, an o-ringless sealing design, and the capability to detect any breach in the fluid path. Suitable for all non-flammable chemistries in either single pass or recirculating flow applications.

Applications

  • Semiconductor wet processes
  • Filtration
  • Sterilization/cleaning
  • Surface finishing

Features

  • Innovative Design for Ultra-High-Purity (UHP)
    • Cleanroom assembled
    • Chemistry contained within PTFE tubing to eliminate environmental exposure
    • No wetted o-rings
    • Patented purge technology detects breaches in the fluid path, prevents chemical permeation and extends heater life (MTFB)
  • Compact, Modular & Configurable
    • Reduced tool design space requirements
    • Easily retrofits to existing tools
    • Customized inlet/outlet options available
  • Low Internal Volume
    • Fast heat-up
    • Reduced chemisty costs
    • Precise and stable temperature control
  • Safety & Reliability
    • Internal ground plane clear of the fluid path
    • Lower surface temperatures
    • Extended life of heater due to patented purge protection

Specifications

  • Wattages: 2000 watts to 6000 watts
  • Voltages: 120 volts to 480 volts, single phase or 3 phase
  • Temperature Range: Up to 120°C (248°F)
  • Pressure:
    • 503 kPa (73 PSI) at 120°C (248°F) for 1/2 inch inlet/outlet flaretek®
    • 427 kPa (62 PSI) at 120°C (248°F) for 3/4 inch inlet/outlet flaretek®
    • 179 kPa (26 PSI) at 120°C (248°F) for 1 inch inlet/outlet flaretek®
    • 496 kPa (72 PSI) at 120°C (248°F) for all Super 300 Type Pillar®
  • Fluid Connections (Inlet/Outlet Sizes/Types):
    • Flared - flaretek®: 1/2 inch, 3/4 inch, or 1 inch
    • Super 300 Type Pillar®: 1/2 inch, 3/4 inch or 1 inch Super 300 Type Pillar®
    • Drain: 3/8 inch, or 1/2 inch flared or Super 300 Type Pillar®
  • Wetted Surfaces:
    • PFA and PTFE fluoropolymer
    • No wetted "O" rings
  • Dimensions: 225mm (8.86") x 508mm (20") x 147mm (5.79")
  • Watt Density: ≤ 9.5/in²
  • Safety Features:
    • Element temperture sensor - Choice between Type E, J, K thermocouple, 100-Ohm RTD, or 1000-Ohm RTD (2, 3, or 4 wire)
    • Internal ground plane
    • Patented purge and leak detection