Ultra-High-Purity Heating

Designed with Ultra-High-Purity processes in mind, Process Technology delivers clean-room assembled, reliable heating and power solutions to fit specific needs.

Products

Lufran Chemical Heater | Chemical Immersion Heater & Inline Chemical Heater

Lufran® Chemical Heater

Constructed with stainless steel wetted materials for heating a variety of chemicals. Suitable for single pass or recirculating applications. Complete high-wattage turn-key solution. Heats up to 356°F (180°C)

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SHB/SHC Heater | Industrial Chemical Heaters for Semiconductor Applications

SHB/SHC

Low wattage, delivers superior indirect heating for chemicals and solvents. Choose SHB/Electropolished 316SS for solvents or SHC/PTFE & PFA wetted surfaces for acids and solvents.

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Nexus Heater - Multi-Loop Chemical Heater for Semiconductor Applications

Nexus

Safe indirect, low-watt, multi-loop heating of acids and solvents with all PFA wetted surfaces. Allows for precise and stable temperature control of multiple chambers.

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Chemheat Inline Heater – Advanced Inline Chemical Heater

Chemheat

New – Compact heating solution for wet-process non-flammable chemistries. All PTFE tubing eliminates environmental exposure. Suitable for single or recirculating applications. Fast heat-up.

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Lufran® DI Water Heater | Best Electric Inline Water Heaters

Lufran® DI Water

Best-in-class! Utilizing PTFE and PVDF wetted surfaces for highly-critical, for highly-critical clean manufacturing processes, using DI Water. Advanced temperature control system. 99% energy efficient! Heats up to 194°F (90°C)

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SHX Inline Heater – Semiconductor and Industrial Solvent Heaters

SHX

NEW – High-performance heater with PTFE components to safely heat isopropyl alcohol (IPA). Supports the stringent cleanliness requirements of next generation node technologies. Heats up to 194°F (90°C). Explosion proof design (SHX-EX) also available.

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