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XC Series

Ultra-high purity heat exchanger

The XC Series heat exchanger features a PFA tube-side fluid path that ensures ultra-high purity to meet the stringent cleanliness requirements necessary for next-generation semiconductor node technologies. Its compact design is ideal for one-pass cooling of chemicals that are directed to the waste stream, eliminating the high costs associated with water aspiration. The XC Series requires less surface area for the same BTU exchange compared to most other fluoropolymer heat exchangers, making it highly efficient.

Temperature range: -60°F (-50°C) to 302°F (150°C)

Applications

  • Semiconductor Wafer Cleaning

Product Information

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